Effective crosstalk isolation through p+ Si substrates with semi-insulating porous Si

IEEE Electron Device Letters

Volumn 23, Issue 3, 2002, Pages 160-162

  Kim, Han Su ^b   Jenkins, Keith A ^a,c   Xie, Ya Hong ^b  

^a IEEE

^b University of California   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Crosstalk; Mixed signal ICs; Porous Si; Radio frequency (RF) isolation

Indexed keywords

CROSSTALK; MOBILE TELECOMMUNICATION SYSTEMS; POROUS SILICON; SUBSTRATES; VLSI CIRCUITS;

RADIO FREQUENCY (RF) ISOLATION;

SILICON WAFERS;

EID: 0036503255     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.988824     Document Type: Article

References (11)

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