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Volumn 5, Issue 3, 2002, Pages
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An efficient model for accurate capacitance-voltage characterization of high-k gate dielectrics using a mercury probe
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Author keywords
[No Author keywords available]
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Indexed keywords
ASSOCIATION REACTIONS;
ELECTRIC IMPEDANCE;
INTERFACES (MATERIALS);
MATHEMATICAL MODELS;
MERCURY (METAL);
PERMITTIVITY;
THICKNESS MEASUREMENT;
CAPACITANCE VOLTAGE CHARACTERIZATION;
HIGH DIELECTRIC CONSTANT GATE DIELECTRICS;
MERCURY PROBE;
DIELECTRIC MATERIALS;
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EID: 0036502058
PISSN: 10990062
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1450382 Document Type: Article |
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Times cited : (26)
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References (7)
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