Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 2 B, 2002, Pages 1085-1089

  Ohira, Tomoaki ^a   Segawa, Tetsuro ^a   Nagai, Kenji ^a   Utaka, Katsuyuki ^a   Nakao, Masashi ^a,b  

^a WASEDA UNIVERSITY   (Japan)

^b NTT CORPORATION   (Japan)

Author keywords

Laser holography; Milling; Photonic crystal; Sub wavelength structure; Wet etching

Indexed keywords

CRYSTAL LATTICES; CRYSTALS; DRY ETCHING; HOLOGRAPHY; LASER APPLICATIONS; SPIN COATING;

LASER HOLOGRAPHY; PHOTONIC CRYSTALS (PC);

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0036478730     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.1085     Document Type: Conference Paper

References (14)