Mechanism of shape formation of three-dimensional periodic nanostructures by bias sputtering

Applied Physics Letters

Volumn 74, Issue 3, 1999, Pages 463-465

  Kawakami, Shojiro ^a   Kawashima, Takayuki ^a   Sato, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000169319     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123037     Document Type: Article

References (14)

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