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Volumn 11, Issue 2, 2002, Pages 273-279
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Excimer laser ablation of silicon carbide ceramic targets
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Author keywords
Laser ablation; Silicon carbide
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Indexed keywords
DECOMPOSITION;
EXCIMER LASERS;
LASER ABLATION;
LASER BEAMS;
MICROSCOPIC EXAMINATION;
MORPHOLOGY;
SILICON CARBIDE;
VAPORIZATION;
EXCIMER LASER ABLATION;
LASER FLUENCES;
CERAMIC MATERIALS;
SILICON CARBIDE;
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EID: 0036472777
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00691-4 Document Type: Article |
Times cited : (21)
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References (27)
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