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Volumn 68, Issue 6, 1996, Pages 773-775
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Uncongruent laser ablation and electroless metallization of SiC
a b b b b b |
Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
BINDING ENERGY;
CATALYST ACTIVITY;
COPPER;
ELECTROPLATING SOLUTIONS;
EXCIMER LASERS;
HYDROFLUORIC ACID;
LASER ABLATION;
NICKEL;
SINGLE CRYSTALS;
SURFACES;
X RAY PHOTOELECTRON SPECTROSCOPY;
AREA SELECTIVE METALLIZATION;
LASER BEAM ENERGY DENSITY;
SURFACE ADHESION;
XENON CHLORIDE EXCIMER LASER;
SILICON CARBIDE;
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EID: 0030569840
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.116738 Document Type: Article |
Times cited : (23)
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References (10)
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