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Surface and Coatings Technology

Volumn 150, Issue 1, 2002, Pages 50-56

Carbon arc plasma transport through different off-plane double bend filters

(5) You, G F a Tay, B K a Lau, S P a Chua, D H C b Milne, W I b

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b UNIVERSITY OF CAMBRIDGE (United Kingdom)

Author keywords

Cathodic arc; Ion density; Macroparticle filter; Off plane double bend

Indexed keywords

CARBON; DEPOSITION; MAGNETIC FILTERS; THIN FILMS;

PLASMA TRANSMISSION EFFICIENCY;

PLASMA APPLICATIONS;

FILM; FILTER; INDUSTRIAL APPLICATION; PLASMA TREATMENT;

EID: 0036470770 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01502-X Document Type: Article

Times cited : (17)

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