SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 133-134, Issue , 2000, Pages 593-597

Plasma flow simulation in an off-plane double bend magnetic filter

(4) Tay, B K a You, G F a Lau, S P a Shi, X a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; DEPOSITION; MATHEMATICAL MODELS; PARTICLES (PARTICULATE MATTER); PLASMA FLOW; PLASMA SIMULATION; VACUUM APPLICATIONS;

CATHODIC ARC PLASMA DEPOSITION; CATHODIC VACUUM ARC DEPOSITION SYSTEM;

MAGNETIC FILTERS;

PLASMA TREATMENT;

EID: 0034310645 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(00)00901-4 Document Type: Article

Times cited : (13)

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