Pole figure analysis of epitaxial films of ZnO:2wt%Al grown on sapphire substrates by RF magnetron sputtering

Materials Research Society Symposium - Proceedings

Volumn 721, Issue , 2002, Pages 93-98

  Kuppusami, P ^a   Fiechter, S ^b   Ellmer, K ^b  

^a INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DOPING (ADDITIVES); FILM GROWTH; MAGNETRON SPUTTERING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUBSTRATES; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

EPITAXIAL FILMS;

THIN FILMS;

EID: 0036458568     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-721-j4.3     Document Type: Conference Paper

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