Ab-initio pseudopotential calculations of phosphorus diffusion in silicon

Materials Research Society Symposium - Proceedings

Volumn 717, Issue , 2002, Pages 181-186

  Liu, Xiang Yang ^a   Windl, Wolfgang ^b   Masquelier, Michael P ^a  

^a MOTOROLA INC   (United States)

^b Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; DIFFUSION; OPTIMIZATION; PHOSPHORUS;

INTERSTITIAL MECHANISMS;

SEMICONDUCTING SILICON;

EID: 0036452069     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-717-c4.7     Document Type: Conference Paper

References (16)

1. R.B. Fair and J.C.C. Tsai, J. Electrochem. Soc. 124, 1107 (1977).
2. P. Fahey, P.B. Griffin, and J.D. Plummer, Rev. Mod. Phys. 61, 289 (1989), and references therein. See also, H. Bracht, MRS Bulletin, June 2000, p. 22-27.
3. P. Fahey, P.B. Griffin, and J.D. Plummer, Rev. Mod. Phys. 61, 289 (1989), and references therein. See also, H. Bracht, MRS Bulletin, June 2000, p. 22-27.
4. A. Ural, P.B. Griffin, and J.D. Plummer, J. of Appl. Phys. 85, 6440 (1999).
5. M. Uematsu, J. Appl. Phys. 82, 2228 (1997); S.T. Dunham, J. Electrochem. Soc. 139, 2628 (1992).
6. M. Uematsu, J. Appl. Phys. 82, 2228 (1997); S.T. Dunham, J. Electrochem. Soc. 139, 2628 (1992).
7. C.S. Nichols, C.G. Vande Valle, and S.T. Pantelides, Phys. Rev. B, 40, 5484 (1989).
8. J.S. Nelson, P.A. Schultz, and A.F. Wright, Appl. Phys. Lett. 73, 247 (1998).
9. G. Kresse and J. Hafner, Phys. Rev. B 47, 558 (1993); 49, 14251 (1994); G. Kresse and J. Furthmüller, Comput. Mater. Sci. 6, 15 (1996); Phys. Rev. B 55, 11169 (1996).
10. G. Kresse and J. Hafner, Phys. Rev. B 47, 558 (1993); 49, 14251 (1994); G. Kresse and J. Furthmüller, Comput. Mater. Sci. 6, 15 (1996); Phys. Rev. B 55, 11169 (1996).
11. G. Kresse and J. Hafner, Phys. Rev. B 47, 558 (1993); 49, 14251 (1994); G. Kresse and J. Furthmüller, Comput. Mater. Sci. 6, 15 (1996); Phys. Rev. B 55, 11169 (1996).
12. G. Kresse and J. Hafner, Phys. Rev. B 47, 558 (1993); 49, 14251 (1994); G. Kresse and J. Furthmüller, Comput. Mater. Sci. 6, 15 (1996); Phys. Rev. B 55, 11169 (1996).
13. M. Methfessel and A.T. Paxton, Phys. Rev. B 40, 3616 (1989).
14. W. Windl, M.M. Bunea, R. Stumpf, S.T. Dunham, and M.P. Masquelier, Phys. Rev. Lett. 83, 4345 (1999).
15. H. Jónsson, G. Mills, and K.W. Jacobsen, in Classical and Quantum Dynamics in Condensed Phase Simulations, edited by B.J. Berne, G. Ciccotti, and D.F. Coker (World Scientific, Singapore, 1998), p. 385.
16. Y.M. Haddara, B.T. Folmer, M.E. Law, and T. Buyuklimanli, Appt. Phys. Lett. 77, 1976 (2000).