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Volumn 4760, Issue I, 2002, Pages 383-393

Femtosecond laser drilling of high aspect ratio 1 μm holes in silicon

Author keywords

Femtosecond; Laser ablation; Lasers; Micromachining; Nanomachining; Semiconductor processing

Indexed keywords

ASPECT RATIO; DRILLING; MICROMACHINING; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036442802     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482107     Document Type: Conference Paper
Times cited : (2)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.