New techniques for laser micromachining MEMS devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4760, Issue 1, 2002, Pages 281-288

  Abbott, Charles ^a   Allott, Ric ^a   Bann, Bob ^a   Boehlen, Karl ^a   Gower, Malcolm ^a   Rumsby, Phil ^a   Boehlen, Ines Stassen ^a   Sykes, Neil ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

Inkjet printer nozzles; Laser micromachining; Plasma display panels

Indexed keywords

ARRAYS; LASER APPLICATIONS; MASKS; MICROMACHINING; MICROSTRUCTURE; NOZZLES; PLASMA DISPLAY DEVICES; SCANNING;

LASER MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036440057     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.482096     Document Type: Article

References (6)

1. M.C. Gower, "Excimer Laser Micromachining: A 10 year perspective" in 'Laser applications in Microelectronic and Optoelectronic Manufacturing IV'. SPIE 3618, 251 (1999).
2. P.T. Rumsby, E.C. Harvey and D.W. Thomas: "Laser Microprojection for Micromechanical Device Fabrication" in 'Experimental Mechanics: Advances and Applications', SPIE, 2921, 684 (1996).
3. M.C. Gower, "Industrial Applications of Pulsed Lasers to Materials Processing" in 'High Power Laser Ablation', SPIE 3343, 171 (1998).
4. E.C. Harvey and P.T. Rumsby "Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser projection" in 'Micromachining and Microfabrication Process Technology III', SPIE 3223, 26 (1997).
5. N.H. Rizvi, P.T. Rumsby and M.C. Gower "New Developments and Applications in the Production of 3D Microstructures by laser Micro machining" in 'Photonic Systems and Applications in Defense and Manufacturing' SPIE, 3898, 240 (1999).
6. C. Dunsky "Beam shaping applications in laser micromachining for the microelectronics industry" in 'Laser Beam Shaping II', SPIE 4443, 135 (2001).