Interferometric testing of plane and cylindrical workpieces with computer-generated holograms

Optical Engineering

Volumn 37, Issue 9, 1998, Pages 2506-2511

  Brinkmann, Sven ^a,b   Schreiner, Roland ^a   Dresel, Thomas ^a   Schwider, Johannes ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b Free University of Nuoro (AILUN)   (Italy)

Author keywords

Binary optics; Computer generated holograms; Diffractive optical elements; Interferometry; Optical testing; Profilometer; Surface metrology

Indexed keywords

EID: 0001030264     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601759     Document Type: Article

References (7)

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3. T. Dresel, J. Schwider, A. Wehrhahn, and S. Babin, "Grazing incidence interferometry applied to the measurement of cylindrical surfaces," Opt. Eng. 34(12), 3531-3535 (1995).
4. J. Schwider, "Verfahren zur Prüfung technischer Oberflächen mit Hilfe von computererzeugten Hologrammen," GDR Pat. Appl. No. WP 106769 (Jan. 4, 1972).
5. L. Denes and J. Salsbury, "Flatness, parallelism and other novel uses of grazing-incidence interferometry in precision engineering," in Topical Conf. on Microscopic Inspection of Macroscopic Structures, pp. 20-23, American Society of Precision Engineering (1995).
6. S. Brinkmann, T. Dresel, R. Schreiner, and J. Schwider, "Axicon-type test interferometer for cylindrical surfaces," Optik 102(3), 106-110 (1996).
7. N. Lindlein, R. Schreiner, S. Brinkmann, T. Dresel, and J. Schwider, "Axicon-type test interferometer for cylindrical surfaces: systematic error assessment," Appl. Opt. 36(13), 2791-2795 (1997).