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Volumn 4342, Issue , 2002, Pages 304-311

Ion-milling method for aperture fabrication in GaP probes for near-field optical memory application

Author keywords

Aperture formation; Gallium phosphate; High density optical recording; Ion milling; Micro fabrication; Near field optical memory; Optical array head; Wet etching

Indexed keywords

ARRAYS; DATA TRANSFER; ETCHING; GALLIUM COMPOUNDS; INTERNET; ION BEAMS; OPTICAL RECORDING; PHOTOLITHOGRAPHY; PROBES;

EID: 0036378469     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.453422     Document Type: Conference Paper
Times cited : (1)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.