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Volumn 4342, Issue , 2002, Pages 304-311
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Ion-milling method for aperture fabrication in GaP probes for near-field optical memory application
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Author keywords
Aperture formation; Gallium phosphate; High density optical recording; Ion milling; Micro fabrication; Near field optical memory; Optical array head; Wet etching
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Indexed keywords
ARRAYS;
DATA TRANSFER;
ETCHING;
GALLIUM COMPOUNDS;
INTERNET;
ION BEAMS;
OPTICAL RECORDING;
PHOTOLITHOGRAPHY;
PROBES;
ION MILLING;
OPTICAL DATA STORAGE;
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EID: 0036378469
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.453422 Document Type: Conference Paper |
Times cited : (1)
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References (11)
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