Control of aperture size of optical probes for scanning near-field optical microscopy using focused ion beam technology

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 7 B, 1997, Pages

  Muranishi, Masaru ^a   Sato, Kazutaka ^a   Hosaka, Sumio ^a   Kikukawa, Atsushi ^a   Shintani, Toshimichi ^a   Ito, Kenchi ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; ION BEAMS; OPTICAL FIBERS; OPTICAL MICROSCOPY; SPATIAL VARIABLES CONTROL;

APERTURE; FOCUSED ION BEAM DRILLING; FOCUSED ION BEAM SLICING; OPTICAL PROBES; SCANNING NEAR FIELD OPTICAL MICROSCOPY; SIZE CONTROL;

PROBES;

EID: 0031189835     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l942     Document Type: Article

References (7)