Electron cyclotron resonance (ECR) sputtered antireflection coatings on laser facets for optical memory applications

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 4 SUPPL. B, 1998, Pages 2201-2202

  Kim, Young Joo ^b   Tateno, Ryo ^a   Ikura, Tomowo ^a   Matsuda, Keita ^a   Kawai, Hideki ^a   Suzuki, Masahiko ^c   Goto, Kenya ^a  

^a TOKAI UNIVERSITY   (Japan)

^b Samsung Electro Mechanics   (South Korea)

^c Asahi Technical Laboratory Co Ltd   (Japan)

Author keywords

Antireflection (AR) coating; Electron cyclotron resonance (ECR) sputter; Ellipsometer; Laser diode chip; Lensless optical head; Refractive index; Semiconductor laser

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; ELLIPSOMETRY; OPTICAL DATA STORAGE; REFRACTIVE INDEX; SEMICONDUCTOR LASERS; SILICA; SILICON NITRIDE; SPUTTER DEPOSITION;

LASER DIODE CHIPS; LENSLESS OPTICAL HEADS;

ANTIREFLECTION COATINGS;

EID: 0032045972     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2201     Document Type: Article

References (5)

1. H. Ukita, Y. Katagiri and S. Fujimori: Appl. Opt. 28 (1989) 4360.
2. K. Goto, T. Sato and S. Mita: Jpn. J. Appl. Phys. 32 (1993) 5459.
3. G. Einstein and L. W. Stulz: Appl. Opt. 23 (1984) 161.
4. Y. Katagiri and H. Ukita: Appl. Opt. 29 (1989) 5074.
5. Y.-J. Kim, Y. Hasegawa and K. Goto: unpublished work.