Formation of GaN self-organized nanotips by nanomasking effect

Materials Research Society Symposium - Proceedings

Volumn 693, Issue , 2002, Pages 239-244

  Yoshida, Harumasa ^a   Urushido, Tatsuhiro ^a   Miyake, Hideto ^a   Hiramtsu, Kazumasa ^a  

^a MIE UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MONTE CARLO METHODS; PLASMAS; REACTIVE ION ETCHING; SEMICONDUCTING GALLIUM COMPOUNDS; SILICA; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOMASKING EFFECT; SELF-ORGANIZED NANOTIPS;

NANOSTRUCTURED MATERIALS;

EID: 0036377256     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)