Simultaneous calculation of reflection, physical sputtering and secondary electron emission from a metal surface due to impact of low-energy ions

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 10, 1999, Pages 6058-6065

  Kawakami, Retsuo ^a   Kawata, Jun ^b   Ohya, Kaoru ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b NATIONAL INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; LIGHT REFLECTION; MONTE CARLO METHODS; SECONDARY EMISSION; SPUTTERING;

ELECTRON CASCADES; ION REFLECTION; PHYSICAL SPUTTERING;

ION BOMBARDMENT;

EID: 0033350673     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.6058     Document Type: Article

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