A method to measure the effective gas path length in the environmental or variable pressure scanning electron microscope

Scanning

Volumn 24, Issue 4, 2002, Pages 171-174

  Gauvin, Raynald ^a   Griffin, Brendan ^b   Nockolds, Clive ^c   Phillips, Matthew ^d   Joy, David C ^e  

^a MCGILL UNIVERSITY   (Canada)

^b UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

^c UNIVERSITY OF SYDNEY   (Australia)

^d UNIVERSITY OF TECHNOLOGY SYDNEY   (Australia)

^e UNIVERSITY OF TENNESSEE   (United States)

Author keywords

Cross sections; Environmental scanning electron microscopy; Gas broadening

Indexed keywords

ELECTRON SCATTERING; SCANNING ELECTRON MICROSCOPY; X RAY ANALYSIS;

GAS PATH LENGTH;

SCANNING;

ANALYTIC METHOD; ARTICLE; ELECTRON TRANSPORT; ENVIRONMENTAL MONITORING; MEASUREMENT; OSCILLATION; PRIORITY JOURNAL; RADIATION SCATTERING; SCANNING ELECTRON MICROSCOPY; STRUCTURE ANALYSIS; X RAY MICROANALYSIS;

EID: 0036329523     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950240402     Document Type: Article

References (5)

1. A new correction method for high-resolution energy-dispersive x-ray analyses in the environmental scanning electron microscope
2. Some theoretical considerations on x-ray microanalysis in the environmental or variable pressure scanning electron microscope
3. From the scanning electron microscope to the scanning electron macroscope in the ESEM
4. Charge contrast imaging of material growth and defects in environmental scanning electron microscopy-linking electron emission and cathodoluminescence
5. X-ray microanalysis in the environmental SEM: A challenge or a contradiction?