Improved microwave performance on low-resistivity Si substrates by Si+ ion implantation

IEEE Transactions on Microwave Theory and Techniques

Volumn 48, Issue 9, 2000, Pages 1582-1585

  Chen, Pin Quan ^a   Chan, Yi Jen ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; ELECTRIC CONDUCTIVITY; EQUIVALENT CIRCUITS; ION IMPLANTATION; MICROWAVE CIRCUITS; Q FACTOR MEASUREMENT; SILICON WAFERS;

SPIRAL INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0034270847     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.869012     Document Type: Article

References (8)

1. C. P. Yue and S. S. Wong, "On-chip spiral inductors with patterned ground shields for Si-based RF IC's," IEEE]. Solid-State Circuits, vol. 33, pp. 85-86, Jan. 1998.
2. M. Soyuer, J. N. Burghartz, K. A. Jenkins, andS. Ponnapalli, "Multilevel monolithic inductors in silicon technology," Electron. Lett., vol. 31, pp. 359-360, 1995.
3. J. N. Burghartz, M. Soyuer, and K. A. Jenkins, "Microwave inductors and capacitors in standard multilevel interconnect silicon technology," IEEE Trans. Microwave Theory Tech., vol. 44, pp. 100-104, Jan. 1996.
4. J. N. Burghartz, M. Soyuer, K. A. Jenkins, and M. D. Hulvey, "High-Q inductor in standard silicon interconnect technology and its application to an integrated RF power amplifier," in Int. Electron Devices Meeting Tech. Dig., 19, pp. 1015-1017.
5. R. B. Merrill, T. W. Lee, H. You, R. Rasmussen, andL. A. Moberly, "Optimization of high-Q integrated inductors for multi-level metal MOS," in Int. Electron Devices Meeting Tech. Dig., 19, pp. 983-986.
6. B. K. Kim, B. K. Ko, and K. Lee, "Monolithic planar inductor and waveguide structure on silicon with performance comparable to those in GaAs MMIC," in Int. Electron Devices Meeting Tech. Dig., 1995, pp. 712-720.
7. C. P. Liao, T. H. Huang, C. Y. Lee, D. Tang, S. Ming, T. N. Yang, and L. F. Lin, "Method of creating local semi-insulating regions on silicon wafers for device isolation and realization of high-Q inductors," IEEE Electron Device Lett., vol. 19, pp. 461-462, 1998.
8. S. Chaki, S. Aono, N. Andoh, Y Sasaki, N. Tanino, and O. Ishihara, "Experimental study on spiral inductors," in IEEE MTTS Int. Microwave Symp. Dig., 19, pp. 753-756.