Precursors for deposition of strontium bismuth tantalate films by direct liquid injection-metallorganic chemical vapor deposition

Journal of the Electrochemical Society

Volumn 149, Issue 1, 2002, Pages

  Kang, Sang Woo ^a   Yang, Kee Jeong ^a   Yong, Ki Jung ^a   Rhee, Shi Woo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; DIFFERENTIAL SCANNING CALORIMETRY; FATIGUE OF MATERIALS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; STRONTIUM COMPOUNDS; THERMOGRAVIMETRIC ANALYSIS;

DIRECT LIQUID INJECTION;

THIN FILMS;

EID: 0036225571     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1421604     Document Type: Article

References (13)