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Volumn 16, Issue 2, 1998, Pages 419-423

Fourier transform infrared diagnostics of gas phase reactions in the metalorganic chemical vapor deposition of aluminum from dimethylethylamine alane

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EID: 0032376578     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581040     Document Type: Article
Times cited : (23)

References (26)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.