Ultracompact corner-mirrors and T-branches in silicon-on-insulator

IEEE Photonics Technology Letters

Volumn 14, Issue 1, 2002, Pages 65-67

  Ahmad, R U ^b   Pizzuto, F ^b   Camarda, G S ^b   Espinola, R L ^b   Rao, H ^b   Osgood Jr , R M ^a,b  

^a IEEE

^b Och Spine at New York Presbyterian Hospitals   (United States)

Author keywords

Beam propagation method; Corner mirror; Finite difference time domain; Integrated optics; Silicon on insulator; T branch; Unibond

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRON BEAM LITHOGRAPHY; FINITE DIFFERENCE METHOD; INTEGRATED OPTOELECTRONICS; LIGHT POLARIZATION; MASKS; MIRRORS; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; SILICON ON INSULATOR TECHNOLOGY; TIME DOMAIN ANALYSIS;

BEAM PROPAGATION METHOD; FINITE DIFFERENCE TIME DOMAIN SIMULATION; OPTICAL INTEGRATED CIRCUITS;

INTEGRATED OPTICS;

EID: 0036183637     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.974163     Document Type: Article

References (15)

1. 0.15 dB/cm loss in Unibond SOI waveguides
2. Small radius bends and large angle splitters in SOI waveguides
3. Mainstreaming of the SOI technology
4. Unibond SOI
5. Silicon on insulator material technology
6. Low loss mirrors for InP/In-GaAsP waveguides
7. Experimental and theoretical study of turning mirrors and beam splitters with optimized structures
8. High-density integrated optics
9. A study of high-index-contrast 90 degree waveguide bend structures
10. Simple and accurate loss measurement technique for semiconductor optical waveguides
11. Ultra-compact 90-degree bends and MMI couplers in silicon-on-insulator
12. Numerical techniques for modeling guided-wave photonic devices
13. Fullwave
14. Reducing radiation loss of tilts in dielectric optical waveguides
15. Highly anisotropic silicon and polysilicon room-temperature etching using fluorine-based high density plasmas