Small radius bends and large angle splitters in SOI waveguides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3007, Issue , 1997, Pages 112-118

  Foresi, James S ^a   Lim, Desmond R ^a   Liao, Ling ^a   Agarwal, Anuradha ^a   Kimerling, Lionel C ^a   Tavassoli, M ^b   Cox, M ^b   Cao, Min ^b   Greene, Wayne M ^b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

Bend; SOI; Splitter; Waveguide; Y branch

Indexed keywords

ELECTROOPTICAL DEVICES; MICROELECTRONIC PROCESSING; OPTOELECTRONIC DEVICES; SILICON COMPOUNDS; YTTRIUM ALLOYS; FABRICATION; MICROELECTRONICS; PERFORMANCE; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SILICA; WAVEGUIDES;

BEND; SOI; SPLITTER; WAVEGUIDE; Y-BRANCH; SINGLE-MODE STRIP WAVEGUIDES; Y-BRANCH POWER SPLITTERS;

WAVEGUIDES; SILICON ON INSULATOR TECHNOLOGY;

EID: 0031364062     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.273843     Document Type: Conference Paper

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