Mainstreaming of the SOI technology

IEEE International SOI Conference

Volumn , Issue , 1999, Pages 1-4

  Shahidi, G ^a   Ajmera, A ^a   Assaderaghi, F ^a   Bolam, R ^a   Bryant, A ^a   Coffey, M ^a   Hovel, H ^a   Lasky, J ^a   Leobandung, E ^a   Lo, H S ^a   Maloney, M ^a   Moy, D ^a   Rausch, W ^a   Sadana, D ^a   Schepis, D ^a  

^a Advanced Silicon Technology Cent   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; LITHOGRAPHY;

MAINSTREAMING;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0033338766     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)