Micromachined two input axis angular rate sensor

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 57-2, Issue , 1995, Pages 957-962

  Ljung, Per B ^a   Juneau, Thor N ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTROSTATIC DEVICES; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; SENSORS; STRAIN; TUNING;

CAPACITIVE PICKOFFS; ELECTROSTATIC DRIVES; FREQUENCY TUNING; NOISE SOURCES; RESIDUAL STRAIN; TWO INPUT AXIS ANGULAR RATE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0029423261     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)