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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 186, Issue 1-4, 2002, Pages 111-115

New results for a novel oxygenated silicon material

(2) Da Via', C a Watts, S J a

a BRUNEL UNIVERSITY (United Kingdom)

Author keywords

DLTS; Oxygen; Oxygen dimer; Silicon detector

Indexed keywords

DEEP LEVEL TRANSIENT SPECTROSCOPY; DIMERS; ELECTRIC CONDUCTIVITY; OXYGEN; PARTICLE DETECTORS; PROTON IRRADIATION; SEMICONDUCTOR DIODES; SUBSTRATES;

OXYGENATED SILICON;

SILICON WAFERS;

EID: 0036134728 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)00878-3 Document Type: Article

Times cited : (8)

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