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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 1, 2002, Pages 479-482

Capacitance sensor with sub-zeptofarad (<10-21 F) sensitivity for scanning capacitance microscopy

(4) Tran, T a Oliver, D R b Thomson, D J b Bridges, G E b

a IDERS Inc (Canada)

b UNIVERSITY OF MANITOBA (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CHARGE CARRIERS; ELECTRIC POTENTIAL; FREQUENCY RESPONSE; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); RESONATORS; SEMICONDUCTOR DEVICES; SPURIOUS SIGNAL NOISE; TRANSMISSION LINE THEORY;

CAPACITANCE SENSORS; SCANNING CAPACITANCE MICROSCOPY (SCM);

SENSORS;

EID: 0036125031 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1424278 Document Type: Conference Paper

Times cited : (11)

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