Initial resolution measurements of an improved magnetic-electrostatic detector objective lens for LVSEM

Ultramicroscopy

Volumn 81, Issue 3-4, 2000, Pages 123-127

  Knell, G ^a   Plies, E ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

Combined magnetic electrostatic lenses; Design of lenses; Electron optics; Low voltage scanning electron microscopy; SEM

Indexed keywords

COMPUTER SIMULATION; ELECTRON ENERGY LEVELS; ELECTROSTATIC LENSES; MAGNETIC CIRCUITS; MAGNETIC LENSES; MAGNETOELECTRIC EFFECTS; OPTICAL DESIGN; OPTICAL RESOLVING POWER; OPTICAL VARIABLES MEASUREMENT; PARTICLE DETECTORS; SCANNING ELECTRON MICROSCOPY;

BEAM ENERGY; DESIGN OF LENSES; INITIAL RESOLUTION MEASUREMENTS; LOW VOLTAGE SCANNING ELECTRON MICROSCOPY; MAGNETIC ELECTROSTATIC DETECTOR; OBJECTIVE LENS; POLE PIECE GAP;

ELECTRON OPTICS;

ARTICLE; CONTRAST; ELECTRICITY; LENS; MAGNETISM; OPTICAL RESOLUTION; SCANNING ELECTRON MICROSCOPE;

EID: 0034064926     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00182-5     Document Type: Article

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