A high-resolution add-on in-lens attachment for scanning electron microscopes

Scanning

Volumn 23, Issue 3, 2001, Pages 204-210

  Khursheed, A ^a   Karuppiah, N ^b   Koh, S H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

Immersion magnetic lenses; Permanent magnets; Scanning electron microscope

Indexed keywords

PERMANENT MAGNETS; SCANNING ELECTRON MICROSCOPY; SPECTROMETERS; VOLTAGE MEASUREMENT;

SPATIAL RESOLUTIONS;

OPTICAL INSTRUMENT LENSES;

ARTICLE; IMAGE RECONSTRUCTION; IMMERSION; MAGNETIC FIELD; PRIORITY JOURNAL; RADIATION SCATTERING; SCANNING ELECTRON MICROSCOPY; SPECTROMETRY;

EID: 0035017454     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950230307     Document Type: Article

References (9)

1. Multi-channel vs. conventional retarding field spectrometers. Proc 3rd European Conf. on Electron and Optical Beam Testing of Integrated Circuits
2. Magnetic axial field measurements on a high resolution miniature scanning electron microscope
3. A portable scanning electron microscope column design based on the use of permanent magnets
4. Practical aspects of high-resolution LVSEM
5. An improved magnetic-collimating secondary electron energy filter for very large scale integrated diagnostics
6. Current efforts to obtain the resolution limit of the transmission electron microscope