메뉴 건너뛰기




Volumn , Issue , 2002, Pages 72-76

Methodology for targeted defect reduction and inspection optimization

Author keywords

Defect kill rates; Defect reduction; Electrical testing; SEM review; Wafer inspection; Yield improvement

Indexed keywords

CORRELATION METHODS; DEFECTS; INSPECTION; OPTIMIZATION; QUALITY CONTROL; SAMPLING; SILICON WAFERS;

EID: 0036075898     PISSN: 1523553X     EISSN: None     Source Type: Journal    
DOI: 10.1109/ASMC.2002.1001577     Document Type: Article
Times cited : (2)

References (4)
  • 3
    • 0033333132 scopus 로고    scopus 로고
    • Process and yield improvement based on fast in-line automatic defect classification
    • Sept.; Santa Clara CA
    • (1999) Proceedings of SPIE , vol.3884 , pp. 278-289
    • Skumanich, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.