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Volumn , Issue , 2002, Pages 72-76
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Methodology for targeted defect reduction and inspection optimization
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Author keywords
Defect kill rates; Defect reduction; Electrical testing; SEM review; Wafer inspection; Yield improvement
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Indexed keywords
CORRELATION METHODS;
DEFECTS;
INSPECTION;
OPTIMIZATION;
QUALITY CONTROL;
SAMPLING;
SILICON WAFERS;
DEFECT KILL RATES;
DEFECT REDUCTION;
WAFER INSPECTION;
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 0036075898
PISSN: 1523553X
EISSN: None
Source Type: Journal
DOI: 10.1109/ASMC.2002.1001577 Document Type: Article |
Times cited : (2)
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References (4)
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