In-line SEM based ADC for advanced process control

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2000, Pages 131-137

  Tomlinson, Wanda ^a   Halliday, Butch ^a   Farrington, Dewey ^a   Skumanich, Andrew ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; INSPECTION; PROCESS CONTROL; SCANNING ELECTRON MICROSCOPY;

AUTOMATIC DEFECT CLASSIFICATION (ADC); YIELD ENHANCEMENT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034482805     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)