Dynamic analysis of micro touch sensor array synthesized by hydrothermal method

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2, Issue , 2002, Pages 1649-1654

  Du, Liqun ^a   Arai, Fumihito ^a   Kwon, Guiryong ^a   Fukuda, Toshio ^a   Itoigawa, Kouichi ^b   Tukahara, Yasunori ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b Tokai Rika Co Ltd   (Japan)

Author keywords

Hydrothermal method; Micro actuator; Micro sensor; Micro touch sensor; PZT thin film

Indexed keywords

ARRAYS; CRYSTAL GROWTH; DYNAMICS; ELECTRIC FIELDS; MATHEMATICAL MODELS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROACTUATORS; NATURAL FREQUENCIES; SUBSTRATES; THIN FILMS;

CANTILEVER BEAM THEORY; HYDROTHERMAL METHOD; MICRO TOUCH SENSOR ARRAY; TOUCH SENSOR;

MICROSENSORS;

EID: 0036060542     PISSN: 10504729     EISSN: None     Source Type: Journal    
DOI: 10.1109/ROBOT.2002.1014779     Document Type: Article

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