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Volumn 2, Issue , 1998, Pages 1498-1503

Parallel beam micro sensor/actuator unit using PZT thin films and its application examples

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); MICROSENSORS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; ROBOTICS; THIN FILMS; BEAMS AND GIRDERS; DIELECTRIC FILMS; GYROSCOPES; SENSORS; TITANIUM;

EID: 0031619737     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.1998.677322     Document Type: Conference Paper
Times cited : (18)

References (10)
  • 2
    • 85054184513 scopus 로고
    • An ultrasonic motor using bending cylindrical transducer based on pzt thin film
    • J T. Morita, M. Kurosawa, and T. Higuclii "An Ultrasonic Motor Using Bending Cylindrical Transducer Based On PZT Thin Film" MEMS-95 Pros-ceding^ 1905)
    • (1905) MEMS-95 Pros-ceding
    • Morita, J.T.1    Kurosawa, M.2    Higuclii, T.3
  • 3
    • 0029732975 scopus 로고    scopus 로고
    • A new fabrication method for micro actuators with piezoelectric thin film using precision cutting technique
    • Y'amagata, S, Mihara, N, Nishioki, and T. Higuchi "A New Fabrication Method for Micro Actuators with Piezoelectric Thin Film using Precision Cutting Technique'"' MEMS-90 Proseed-ings ( 1996)
    • (1996) MEMS-90 Proseed-ings
    • Mihara, Y.S.1    Nishioki, N.2    Higuchi, T.3
  • 4
    • 0026224750 scopus 로고
    • Preparation of lead zircoiiate ti-Tanate thiii film hy hydrothcriual method
    • K. Sliiiiionmra, T.Tsurmiii, Y Ohba. and M. Daimoii "Preparation of Lead Zircoiiate Ti-Tanate Thiii Film hy Hydrothcriual Method" jpii.J. Appl. phys.30 (1991)2174
    • (1991) Jpii.J. Appl. Phys , vol.30 , pp. 2174
    • Sliiiiionmra, K.1    Tsurmiii, T.2    Ohba, Y.3    Daimoii, M.4
  • 7
    • 85054170152 scopus 로고
    • Dcvel-Ojiment of a Pin-Type Loadcell" Transactions of tlie Japan So( iety of Mechanical Engineers. C54.497, (in .Japanese)
    • Yotaro Hatamnra awl Ryouji Takada "'Dcvel-Ojiment of a Pin-Type Loadcell" Transactions of tlie Japan So( iety of Mechanical Engineers. C54.497(1993), (in .Japanese)
    • (1993) Yotaro Hatamnra Awl Ryouji Takada
  • 8
    • 0001094893 scopus 로고
    • Vibrating angular rate sensor may threaten the gyroscope
    • W.D. Gates, "Vibrating angular rate sensor may threaten the gyroscope" Elecironics.41(10) (1908)130-134
    • (1908) Elecironics.41 , vol.10 , pp. 130-134
    • Gates, W.D.1
  • 10
    • 85054173658 scopus 로고
    • I:. Fujimoto, ''Piezoelectric vibratory gyroscope using ilexu-ral vibration of a.Triangular bar
    • Los Angeles, CA, USA
    • S. I'ujislunm. T. Nakamura aud I"':. Fujimoto, ''Piezoelectric vibratory gyroscope using ilexu-ral vibration of a.Triangular bar" Prac. 45th Syiiip. Frequency Control. Los Angeles, CA, USA. 1991, pp. 2G1-2G1
    • (1991) Prac. 45th Syiiip. Frequency Control , pp. 2G1-2G1
    • I'Ujislunm, S.1    Nakamuraaud, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.