Parallel beam micro sensor/actuator unit using PZT thin films and its application examples

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2, Issue , 1998, Pages 1498-1503

  Fukuda, T ^a   Sato, H ^a   Arai, F ^a   Iwata, H ^a   Itoigawa, K ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b Tokai Rika Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); MICROSENSORS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; ROBOTICS; THIN FILMS; BEAMS AND GIRDERS; DIELECTRIC FILMS; GYROSCOPES; SENSORS; TITANIUM;

ACTUATORS AND SENSORS; APPLICATION EXAMPLES; COMPLICATED STRUCTURES; HYDROTHERMAL METHODS; PARALLEL BEAM STRUCTURES; SENSORS AND ACTUATORS; TITANIUM SUBSTRATES; TWO DEGREES OF FREEDOM;

PIEZOELECTRIC MATERIALS; ACTUATORS;

HYDROTHERMAL METHOD;

EID: 0031619737     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.1998.677322     Document Type: Conference Paper

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