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Volumn 2, Issue , 1998, Pages 1498-1503
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Parallel beam micro sensor/actuator unit using PZT thin films and its application examples
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Author keywords
[No Author keywords available]
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Indexed keywords
DEGREES OF FREEDOM (MECHANICS);
MICROSENSORS;
PIEZOELECTRIC ACTUATORS;
PIEZOELECTRICITY;
ROBOTICS;
THIN FILMS;
BEAMS AND GIRDERS;
DIELECTRIC FILMS;
GYROSCOPES;
SENSORS;
TITANIUM;
ACTUATORS AND SENSORS;
APPLICATION EXAMPLES;
COMPLICATED STRUCTURES;
HYDROTHERMAL METHODS;
PARALLEL BEAM STRUCTURES;
SENSORS AND ACTUATORS;
TITANIUM SUBSTRATES;
TWO DEGREES OF FREEDOM;
PIEZOELECTRIC MATERIALS;
ACTUATORS;
HYDROTHERMAL METHOD;
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EID: 0031619737
PISSN: 10504729
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ROBOT.1998.677322 Document Type: Conference Paper |
Times cited : (18)
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References (10)
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