Carbon nanotube scanning probe for surface profiling of DUV and 193 nm photoresist pattern

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4689 I, Issue , 2002, Pages 58-62

  Nguyen, Cattien V ^a   Stevens, Ramsey M D ^a   Barber, Jabulani ^a   Han, Jie ^a   Meyyappan, M ^a   Sanchez, Martha I ^b   Larson, Carl ^b   Hinsberg, William D ^b  

^a NASA AMES RESEARCH CENTER   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

Atomic force microscopy; Carbon nanotube; Imaging; Lithography; Nanotube tip probe; Photoresist; Profilometry; Semiconductor metrology

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; CMOS INTEGRATED CIRCUITS; IMAGING TECHNIQUES; OPTICAL RESOLVING POWER; PROFILOMETRY;

SEMICONDUCTOR METROLOGY;

PHOTORESISTS;

EID: 0036030846     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.473506     Document Type: Article

References (12)

1. See http://public.itrs.net/Files/2001 ITRS/Home.html for 2001 ITRS Roadmap.
2. W.C. Wu and W.E. Wallace, J. Vac. Sci. Technol. B, 16, 1958 (1998).
3. Y.E. Stausser, M. Schroth, and J. Seeney, J. Vac. Sci. Technol. A, 15, 1007(1997).
4. R. Edrei, E.N. Shaulu, and A. Hoffman, J. Vac. Sci. Technol. B, 18, 41(2000).
5. S. Iijima, Nature, 354, 56 (1991).
6. P. Collins and P. Avouris, Scientific American, p62, (December 2000).
7. X. Liu, C. Lee, C. Zhou and J. Han, Appl. Phys. Lett., 79, 3329 (2001).
8. A.M. Cassell, S. Verma, J. Han and M. Meyyappan, Langmuir, 17, 260 (2001).
9. L. Delzeit, B. Chen, A. Cassell, R. Stevens, C. Nguyen, and M. Meyyappan, Chem. Phys. Lett., 348, 368 (2001).
10. M. Meyyappan and D. Srivastava, Carbon Nanotubes, in Handbook of Nanoscience, Engineering and Technology, Edited by S. Lyshevski, D. Brenner, G. Iafrate and W. Goddard, CRC Press (2002).
11. C.V. Nguyen, K.J. Chao, R.M.D. Stevens, L. Delzeit, A. Cassell, J. Han, and M. Meyyappan, Nanotechnology, 12, 363(2001).
12. R. Stevens, C. Nguyen, A.M. Cassell, L. Delzeit, M. Meyyappan, and J. Han, Appl. Phys. Lett., 77, 3453 (2000).