Novel surface imaging method using surface monolayer initiated polymerization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4690 II, Issue , 2002, Pages 1025-1033

  McCoy, Kendra ^a   Gumieny, Charles ^a   Hess, Dennis W ^a   Tolbert, Laren M ^a   Henderson, Clifford L ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MONOMERS; POLYMERIZATION; POLYMERS; RADIATION; REACTION KINETICS; RESINS; X RAY PHOTOELECTRON SPECTROSCOPY;

SURFACE IMAGING METHODS;

IMAGING TECHNIQUES;

EID: 0036030132     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.474178     Document Type: Conference Paper

References (12)

1. International Roadmap for Semiconductors: Lithography Edition,. 2001. p. 1-21.
2. Henderson, C., et al., Top surface imaging resists for EUV lithography. Proc. SPIE 3331, 1998: p. 32-40.
3. Irmscher, M., et al., Top surface imaging process at and below quarter-micron resolution and pattern transfer into metal. J. Vac. Sci. Technol. B, 1997.15(6): p. 2605-2609.
4. Postnikov, S.V., et al., Top surface imaging through silylation. Proc. SPIE 3333, 1998: p. 997-1008.
5. Mori, S., et al., Reduction of line edge roughness in the top surface imaging process. J. Vac. Sci. Technol. B, 1998.16(6): p. 3739-3743.
6. Somervell, M.H., et al., Study of the fundamental contributions to line edge roughness in a 193 nm, top surface imaging system. Journal of Vacuum Science and Technology B, 2000.18(5): p. 2551-2559.
7. Prucker, O., et al., Microstructuring of Molecularly Thin Polymer Layers by Photolithography. Advance Materials, 1998.10(14): p. 1073-1077.
8. Prucker, O. and J. Ruhe, Mechanism of radical chain polymerizations initiated by azo compounds covalently bound to the surface of spherical particles. Macromolecules, 1998.31: p. 602-613.
9. Prucker, O., et al., Photolithographic structuring of surface-sttached polymer monolayers. Materials Science and Engineering C, 1999. 8-9: p. 291-297.
10. 2 surfaces using surface monolayer initiated polymerization. Journal of Vacuum Science and Technology B, 2001.19(6): p. 2013-2019.
11. Bevington, J.C. and H.G. Troth, Further tracer studies of Azoisobutyronitrile as an initiator for radical polymerization. Transactions of the Faraday Society, 1962. 58: p. 186-191.
12. Blackley, D.C. and A.C. Haynes, Kinetics of thermal decomposition of 4,4-azobis-(4-cyanopentanoic acid) and its salts in aqueous solution. Journal of the Chemical Society, Faraday Transactions, 1979.75: p. 935-941.