Characterization of large-area inductively coupled plasma by use of a long-range fast-scanning probe

Journal of the Korean Physical Society

Volumn 40, Issue 5, 2002, Pages 942-945

  Jung, Yong Ho ^a   Choi, Yong Sup ^a   Chung, Kyu Sun ^a   Bak, Jun Kyo ^b  

^a Hanyang University   (South Korea)

^b Korea Basic Science Institute (KBSI)   (South Korea)

Author keywords

Combined mobility model; Fast scanning probe; Hanbit; Inductive coupled plasma; Variable mobility model

Indexed keywords

EID: 0036015143     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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