Ion and neutral temperatures in a novel ultrahigh-frequency discharge plasma

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 3 A, 1996, Pages

  Nakano, Toshiki ^a   Ohtake, Hiroto ^b   Samukawa, Seiji ^b  

^a NATIONAL DEFENSE ACADEMY   (Japan)

^b NEC CORPORATION   (Japan)

Author keywords

Ion temperature; Laser induced fluorescence; Neutral temperature; Spokewise antenna; UHF plasma

Indexed keywords

FLUORESCENCE; LASER BEAM EFFECTS; TEMPERATURE MEASUREMENT;

DOPPLER SHIFTED LASER INDUCED FLUORESCENCE; ION TEMPERATURE; NEUTRAL TEMPERATURE; SPOKEWISE ANTENNAS; ULTRAHIGH FREQUENCY DISCHARGE PLASMA;

PLASMAS;

EID: 0030109382     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l338     Document Type: Article

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