Bulk image formation of scalar modeling in a photoresist

Journal of the Korean Physical Society

Volumn 41, Issue 4, 2002, Pages 456-460

  Kim, Sang Kon ^a   Oh, Hye Keun ^a  

^a Hanyang University   (South Korea)

Author keywords

Acid distribution; Aerial image; Bulk image, Scalar model; CAR; Defocus model; Projection lens system; Vertical propagation

Indexed keywords

EID: 0035981403     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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