Monte-Carlo based optical proximity correction of DRAM storage capacitors and hammer heads

Journal of the Korean Physical Society

Volumn 40, Issue 1, 2002, Pages 163-166

  Kim, Jong Sun ^a   Park, Ki Chon ^a   Kim, Young Dong ^a   Oh, Yong Ho ^a   Lee, Jai Cheol ^a   Go, Chun Soo ^a   Lim, Sungwoo ^a  

^a Wonkwang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036002423     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (11)

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