Direct patterning of nanometer-scale silicide structures on silicon by ion-beam implantation through a thin barrier layer

Applied Physics Letters

Volumn 78, Issue 18, 2001, Pages 2727-2729

  Mitan, M M ^a   Pivin, D P ^a   Alford, T L ^a   Mayer, J W ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035971687     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1369608     Document Type: Article

References (18)

1. W. Xia, C. A. Hewett, M. Fernandes, S. S. Lau, and D. B. Poker, J. Appl. Phys. 65, 2300 (1989).
2. A. H. Hamdi and M.-A. Nicolet, Thin Solid Films 119, 357 (1984).
3. L. Niewöhner and D. Depta, Nucl. Instrum. Methods Phys. Res. B 59/60, 523 (1991).
4. M. Ye, E. P. Burte, and H. Ryssel, Nucl. Instrum. Methods Phys. Res. B 59/60, 528 (1991).
5. C. Dehm, I. Kasko, E. P. Burte, J. Gyulai, and H. Ryssel, Appl. Surf. Sci. 73, 268 (1993).
6. I. Kasko, C. Dehm, L. Frey, and H. Ryssel, Nucl. Instrum. Methods Phys. Res. B 81, 786 (1993).
7. A. Baba, H. Aramaki, T. Sadoh, and T. Tsurushuma, J. Appl. Phys. 82, 5480 (1997).
8. S. Kal, I. Kasko, and H. Ryssel, J. Electron. Mater. 24, 1349 (1995).
9. L. S. Hung, Q. Z. Hong, and J. W. Mayer, Nucl. Instrum. Methods Phys. Res. B 37/38, 414 (1989).
10. L. S. Wielunski, C.-D. Lien, B.-X. Liu, and M.-A. Nicolet, Proceedings of the Materials Research Society Symposia. Boston, MA (North Holland, New York, 1982), pp. 139-45.
11. A. E. White, K. T. Short, R. C. Dynes, J. P. Garno, and J. M. Gibson, Appl. Phys. Lett. 50, 95 (1987).
12. L. Bischoff, K.-H. Heinig, J. Teichert, and W. Skorupa, Nucl. Instrum. Methods Phys. Res. B 112, 201 (1996).
13. M. Y. Yew and L. J. Chen, J. Vac. Sci. Technol. B 17, 939 (1999).
14. A. Steegen, I. D. Wolf, and K. Maex, J. Appl. Phys. 86, 4290 (1999).
15. H. Fuhrmann, M. Döbeli, and R. Mühle, J. Vac. Sci. Technol. B 17, 945 (1999).
16. D. Drouin, J. Beauvais, R. Lemire, E. Lavallée, R. Gauvin, and M. Caron, Appl. Phys. Lett. 70, 3020 (1997).
17. J. F. Ziegler, IBM Research, Yorktown, NY, 10598.
18. J. P. Gambino and E. G. Colgan, Mater. Chem. Phys. 52, 99 (1998).