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Volumn 73, Issue 25, 1998, Pages 3653-3655

Highly reflective GaN/Al0.34Ga0.66N quarter-wave reflectors grown by metal organic chemical vapor deposition

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001607822     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122852     Document Type: Article
Times cited : (120)

References (11)
  • 8
    • 22244488171 scopus 로고    scopus 로고
    • note
    • Since the total gas flow was increased from 19.5 to 36 l/min, the surface temperature of substrates must have been decreased. To compensate for this effect, we increased the substrate temperature from 1075 to 1092 °C.
  • 9
    • 22244439301 scopus 로고    scopus 로고
    • note
    • 0.66N layers were grown without changing the gas flow rates so that abrupt interfaces should be obtained.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.