X-ray waveguide as a new tool for 100 nm spatially resolved x-ray strain analysis

Journal of Physics D: Applied Physics

Volumn 34, Issue 10 SPEC. ISS. A, 2001, Pages

  Giannini, C ^a   De Caro, L ^a   Lagomarsino, S ^b   Cedola, A ^b   Di Fonzo, S ^c   Jark, W ^c  

^a Centro Nazionale per la Ricerca e lo Sviluppo dei Materiali   (Italy)

^b CNR   (Italy)

^c SINCROTRONE TRIESTE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; COMPUTER SIMULATION; OPTICAL DEVICES; OPTICAL WAVEGUIDES; SILICON WAFERS; STRAIN; X RAY DIFFRACTION; X RAY MICROSCOPES;

RESIDUAL STRAIN; X-RAY RECIPROCAL SPACE MAPPING;

SEMICONDUCTING FILMS;

EID: 0035926687     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/34/10a/309     Document Type: Article

References (13)

1. ESPRIT, Microelectronics Advanced Research Initiative (MEL-ARI), webpage http://www.cordis.lu/esprit/src/melop-rm.htm, ftp site ftp://ftp.cordis.lu/pub/esprit/docs/meloprm.doc
2. Radelaar S 1992 Technology and fabrication of quantum devices: submicron lithography and etching techniques Physics and Technology of Semiconductor Quantum Devices ed K H Ploog and L Tapfer (Berlin: Springer) and references therein
3. Jark W, Di Fonzo S, Lagomarsino S, Cedola A, Di Fabrizio E, Brahm A and Riekel C 1996 J. Appl. Phys. 80 4831-6
4. Di Fonzo S, Jark W, Lagomarsino S, Giannini C, De Caro L, Cedola A and Muller M 2000 Nature 403 638-40
5. Cedola A 1999 Production de faisceaux de rayons X submicroniques par guide d'onde en couches minces PhD Thesis Grenoble University
6. Appels J A, Kooi E, Paffen M M, Schatorge J J H and Verkuylen W H C G 1970 Philips Res. Rep. 25 118-32
7. Hu S M 1979 J. Appl. Phys. 50 4661
8. Fisher A and Richter H 1994 J. Appl. Phys. 75 657
9. Atkinson A, Johnson T, Harker A H and Jain S C 1996 Thin Solid films 274 106
10. De Caro L et al in progress
11. Hu S M 1978 Appl. Phys. Lett. 32 5
12. De Caro L, Giannini C and Tapfer L 1997 Phys. Rev. B 56 9477
13. De Caro L, Giannini C and Tapfer L 1996 J. Appl. Phys. 79 4101