Significant reduction of impurity contents in hydrogenated microcrystalline silicon films for increased grain size and reduced defect density

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 3 A, 1998, Pages

  Kamei, Toshihiro ^a   Kondo, Michio ^a   Matsuda, Akihisa ^a  

^a Thin Film Silicon Solar Cells S   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL IMPURITIES; CRYSTAL STRUCTURE; ENERGY GAP; FERMI LEVEL; GRAIN SIZE AND SHAPE; HYDROGENATION; MATHEMATICAL MODELS; OPTICAL PROPERTIES; QUARTZ; SEMICONDUCTING SILICON; THERMAL EFFECTS;

SCHERRER'S EQUATION; ULTRAHIGH VACUUM PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0032021693     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l265     Document Type: Article

References (9)