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Thin Solid Films

Volumn 389, Issue 1-2, 2001, Pages 8-11

Stress evolution in polycrystalline thin film reactions

(2) Lucadamo, G a Barmak, K b

a Lehigh University (United States)

b CARNEGIE MELLON UNIVERSITY (United States)

Author keywords

Aluminum; Calorimetry; Multilayers; Niobium; Phase formation; Stress

Indexed keywords

ALUMINUM; CALORIMETRY; HEATING; NIOBIUM; OXIDATION; PHASE TRANSITIONS; POLYCRYSTALLINE MATERIALS; SILICON WAFERS; TENSILE STRENGTH; THERMAL CYCLING; THIN FILMS;

STRESS EVOLUTION;

METALLIC SUPERLATTICES;

EID: 0035876681 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)00861-6 Document Type: Letter

Times cited : (4)

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