Stress change in passivated Al lines due to the reaction between Ti and Al

Materials Research Society Symposium - Proceedings

Volumn 516, Issue , 1998, Pages 213-218

  Marieb, T ^a   Mack, A ^a   Lee, J ^a   DiBattista, M ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METALLIC FILMS; PASSIVATION; SHRINKAGE; STRESS ANALYSIS; STRESS RELAXATION; TENSILE STRESS; THERMAL STRESS; THIN FILMS; TITANIUM ALLOYS;

BLANKET FILMS; PASSIVATED INTERCONNECT LINES; TITANIUM ALUMINIDE;

SEMICONDUCTING FILMS;

EID: 0032320651     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-516-213     Document Type: Conference Paper

References (6)