Structural differences between deuterated and hydrogenated silicon nitride/oxynitride

Journal of Applied Physics

Volumn 89, Issue 10, 2001, Pages 5355-5361

  Shih, An ^a   Yeh, Shin Hung ^a   Lee, Si Chen ^a   Yang, T R ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035873288     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1364645     Document Type: Article

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