Structural and optical properties of amorphous silicon oxynitride

Journal of Applied Physics

Volumn 79, Issue 2, 1996, Pages 656-663

  Yeh, Jiun Lin ^a   Lee, Si Chen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ANNEALING; COMPOSITION EFFECTS; ELLIPSOMETRY; GLOW DISCHARGES; HYDROGEN BONDS; INFRARED SPECTROSCOPY; MOLECULAR STRUCTURE; NITROGEN; OPTICAL PROPERTIES; OXYGEN; PHOTOLUMINESCENCE;

AMORPHOUS SILICON OXYNITRIDE; BENDING MODES; BOND STRETCHING MODES; ELECTRONEGATIVITY; MOLECULAR CLUSTERS; OPTICAL GAP; ROCKING MODES; WAGGING MODES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0029733914     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.360809     Document Type: Article

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