Optical characterization of diamond-like carbon films

Vacuum

Volumn 61, Issue 2-4, 2001, Pages 279-283

  Franta, D ^a   Zajickova L ^a   Ohlidal I ^a   Janca J ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

Author keywords

Amorphous materials; DLC films; Ellipsometry; Optical properties

Indexed keywords

AMORPHOUS FILMS; CARBON; ELLIPSOMETRY; THICKNESS MEASUREMENT;

DIAMOND-LIKE CARON FILMS;

OPTICAL FILMS;

EID: 0035858537     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00130-0     Document Type: Conference Paper

References (10)

1. Logothetidis S, Stergioudis G. Appl Phys Lett 1997;71:2463-5.
2. Lee J, Collins RW, Veerasamy VS, Robertson J. Diamond Relat Mater 1998;7:999-1009.
3. Mori T, Fujii N, Xiong YM, Saitoh T. Thin Solid Films 1995;270:215-9.
4. Zhang X, Weber WH, Vassell WC, Potter TJ, Tamor MA. J Appl Phys 1998;83:2820-5.
5. Godet C, Heitz T, Bourée JE, Drévillon B, Clerc C. J Appl Phys 1998;84:3919-32.
6. Hong J, Goullet A, Turban G. Thin Solid Films 1999;352:41-8.
7. Zajíčková L, Buršíková V, Franta D. Czech J Phys 1999;49:1213-28.
8. Ohlídal I, Franta D. Ellipsometry of thin film system, in: Wolf E (Ed.) Progress in Optics 41. Amsterdam: North-Holland, 2000; 181-282.
9. Ohlídal I, Franta D, Pinčík E, Ohlídal M. Surf Interface Anal 1999;28:240-4.
10. Franta D, Zajíčková L, Ohlídal I, Janča J, Veltruská K. Thin Solid Films, submitted for publication.