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Surface Science

Volumn 492, Issue 1-2, 2001, Pages

Epitaxial growth of Sb thin film and chemical reaction of Sb-induced surface reconstruction on Si(1 1 3)3 × 2

(6) An, K S a Hwang, C C b Kim, Y K c Cho, E S c Park, C Y c Kakizaki, A d

a Korea Research Institute of Chemical Technology (South Korea)

b Pohang University of Science and Technology (POSTECH) (South Korea)

c Sungkyunkwan University (South Korea)

d HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION KEK (Japan)

Author keywords

Antimony; Atom solid interactions; Auger electron spectroscopy; Epitaxy; Growth; Low energy electron diffraction (LEED); Silicon; Surface chemical reaction; Surface structure, morphology, roughness, and topography

Indexed keywords

ANTIMONY; AUGER ELECTRON SPECTROSCOPY; DEPOSITION; EPITAXIAL GROWTH; LOW ENERGY ELECTRON DIFFRACTION; OXYGEN; PASSIVATION; SILICON; SUBSTRATES; SURFACE ROUGHNESS; THERMAL EFFECTS; THIN FILMS;

SYMMETRIC HEXAGONAL STRUCTURES;

SURFACE REACTIONS;

EID: 0035840947 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(01)01441-8 Document Type: Article

Times cited : (7)

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